| SIS Junction Test Mask |
Layout |
Test Structures |
| Process Development |
Niobium Films |
Stress measurements |
Sidewall Slope |
SiO2 Films |
Stress |
Pinhole Density |
Sidewall Slope |
MEMS Integration |
Frontside Etching of Si3N4 Membranes |
| Equipment Development |
SiO2 Sputtering System |
Layout |
Film Uniformity Calculations |
Closed Cycle Test Station |
| Computer Networking |
WAN |
LAN |
DAQ |