Study of processes and materials for MEMS
integration with cryogenic devices *

A thesis submitted to the faculty of
San Francisco State University
in partial fulfillment of the
requirements for the
degree
 

Master of Science
in
Engineering
 

by

Juan Pablo Saenz

San Francisco, California

December, 2003

 

This thesis presents a review of superconductive theory and devices to introduce the characterization of niobium thin films.   This thesis presents in detail the study of a MEMS-like thermal isolation structure as a building block for doubly-integrated cryogenic devices.


(* A copy of this thesis, in PDF format, is viewable by clicking on this link.)