AN E-BEAM/RAH SYSTEM FOR INDUCING LOCALIZED STRUCTURAL PHASE TRANSITIONS IN TUNGSTEN FILMS

A thesis submitted to the faculty of
San Francisco State University
in partial fulfillment of the
requirements for the
degree
 

Master of Science
in
Physics
 

by

Windsor Ellis Owens

San Francisco, California

October, 1995

 

This thesis describes the design and construction of a focused electron beam system used in the manufacture of Transition Edge Sensors with Traps (TESTs).  The goal is to develop a piece of equipment that can achieve temperatures of at least 650 C on a 500 ┼ thick tungsten film over areas no larger than 25 Ám2.  All of the modifications made to the original Manufacturing Electron Seam Exposure System (MEBES) I system are addressed, including the addition of Radiation Assisted Heating (RAH).  The initial system performance is evaluated and discussed, followed by optimization of the system.  Future improvements are suggested to allow the machine to reach its full potential.